Instrument: JEOL JXA-8530F Field Emission Electron Probe Microanalyzer


Microscopy and Imaging


SB 60 Benedum

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This EPMA’s FE electron gun produces a probe that is only 1/2 to 1/10 the size of that produced in a thermionic emission electron gun in a conventional EPMA, using a W filament or a LaB6 tip. The FE electron gun is capable of producing a micro probe at low accelerating voltage even with high probe currents (10 to 100 nA), allowing for WDS analyses with high X-ray spatial resolution.