Details
This EPMA’s FE electron gun produces a probe that is only 1/2 to 1/10 the size of that produced in a thermionic emission electron gun in a conventional EPMA, using a W filament or a LaB6 tip. The FE electron gun is capable of producing a microprobe at low accelerating voltage even with high probe currents (10 to 100 nA), allowing for WDS analyses with high X-ray spatial resolution.
Type
Microscopy and Imaging
Facility
SB 60 Benedum