Details
The EA10 XPS spectrometer is a home built multi-technique surface analysis instrument with X-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy (AES), and scanning electron microscopy (SEM) capabilities. The system is equipped with:
- X-ray photoelectron spectroscopy (XPS)
- Polychromatic dual anode X-ray source (Al and Mg anodes)
- Electron flood gun for charge neutralization of non-conductive samples
- EA-10 100 mm hemispherical energy analyzer with single channel naked PMT detector
- Auger electron spectroscopy (AES)
- PHI 10-150 fixed beam cylindrical mirror energy analyzer (CMA) and thermionic electron gun
- PHI 4-303 differentially pumped 3 KeV Ar+ ion gun for depth profiling and ion milling
- Scanning electron microscopy (SEM)
- FEI field emission (FEG) stacked disk scanning electron microscope
- Microchannel plate secondary electron detector
- Fast turbo molecular pumped load lock entry chamber
- With advanced notice, the instrument can also be equipped with:
- deep UV photon source for Ultra-violet photoelectron spectroscopy (UPS; HeI and HeII lines)
- Low energy electron diffraction (LEED) gun and detector
Type
Surface and Thin Film Analysis
Facility
Materials Characterization Lab
136 Eberly Hall