Instrument: EA10 XPS with FEI SEM and Auger spectrometer


Surface and Thin Film Analysis


136 Eberly Hall



The EA10 XPS spectrometer is a home built multi-technique surface analysis instrument with X-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy (AES), and scanning electron microscopy (SEM) capabilities. The system is equipped with:

  • X-ray photoelectron spectroscopy (XPS)
    • Polychromatic dual anode X-ray source (Al and Mg anodes)
    • Electron flood gun for charge neutralization of non-conductive samples
    • EA-10 100 mm hemispherical energy analyzer with single channel naked PMT detector
  • Auger electron spectroscopy (AES)
    • PHI 10-150 fixed beam cylindrical mirror energy analyzer (CMA) and thermionic electron gun
    • PHI 4-303 differentially pumped 3 KeV Ar+ ion gun for depth profiling and ion milling
  • Scanning electron microscopy (SEM)
    • FEI field emission (FEG) stacked disk scanning electron microscope
    • Microchannel plate secondary electron detector 
  • Fast turbo molecular pumped load lock entry chamber
  • With advanced notice the instrument can also be equipped with:
    • deep UV photon source for Ultra-violet photoelectron spectroscopy (UPS; HeI and HeII lines)
    • Low energy electron diffraction (LEED) gun and detector