Director, Materials Characterization Lab
The Novascan PSD digital ozone cleaner is used to clean small items and samples such as AFM probes and wafers. The cleaner operates by converting oxygen to ozone using a high intensity UV lamp. The ozone, along with free radicals generated at the surface of the object being cleaned, efficiently removes organic surface contamination. The instrument can be run using ambient air or the ozone yield can be enhanced by using supplemental oxygen.