The EA10 XPS spectrometer is a home built multi-technique surface analysis instrument with X-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy (AES), and scanning electron microscopy (SEM) capabilities. The system is equipped with:

• X-ray photoelectron spectroscopy (XPS)
  • Polychromatic dual anode X-ray source (Al and Mg anodes)
  • Electron flood gun for charge neutralization of non-conductive samples
  • EA-10 100 mm hemispherical energy analyzer with single channel naked PMT detector
• Auger electron spectroscopy (AES)
  • PHI 10-150 fixed beam cylindrical mirror energy analyzer (CMA) and thermionic electron gun
  • PHI 4-303 differentially pumped 3 KeV Ar+ ion gun for depth profiling and ion milling
• Scanning electron microscopy (SEM)
  • FEI field emission (FEG) stacked disk scanning electron microscope
  • Microchannel plate secondary electron detector 
• Fast turbo molecular pumped load lock entry chamber
• With advanced notice the instrument can also be equipped with:
  • deep UV photon source for Ultra-violet photoelectron spectroscopy (UPS; HeI and HeII lines)
  • Low energy electron diffraction (LEED) gun and detector